Wavelength selection for multilayer coatings for lithography generation beyond extreme ultraviolet

Wavelength selection for multilayer coatings for lithography generation beyond extreme ultraviolet

Lifetime Studies of Mo/Si and MO/Be Multilayer Coatings for Extreme Ultraviolet Lithography

Extreme Ultraviolet Lithography (EUVL) is a candidate for future application by the semiconductor industry in the production of sub-100 nm feature sizes in integrated circuits. Using multilayer reflective coatings optimized at wavelengths ranging from 11 to 14 nm, EUVL represents a potential successor to currently existing optical lithography techniques. In order to assess lifetimes of the mult...

Coatings for Ultraviolet Lithography

Research into an optical thin film coating that enhances the current design of lithographic excimer laser gratings operating at 193 and 157 nm has been performed. The goal of such research is to improve durability and reflective efficiency. Possible coating materials include the fluorides, magnesium fluoride, barium fluoride, lanthanum fluoride and calcium fluoride. Each fluoride material was d...

Undulator radiation for at-wavelength interferometry of optics for extreme-ultraviolet lithography.

Techniques are described for at-wavelength interferometry of multilayer coated optics designed for use in extreme-ultraviolet lithography. Broadly tunable undulator radiation, which covers the spectral region from 45 to 400 A, is described. The coherent power available at these wavelengths is described, and several types of interferometer that might be suitable at these short wavelengths are al...

Optimal Wavelength Selection in Ultraviolet Spectroscopy for the Estimation of Toxin Reduction Ratio during Hemodialysis

Introduction The concentration of substances, including urea, creatinine, and uric acid, can be used as an index to measure toxic uremic solutes in the blood during dialysis and interdialytic intervals. The on-line monitoring of toxin concentration allows for the clearance measurement of some low-molecular-weight solutes at any time during hemodialysis.The aim of this study was to determine the...